FFKM for Semiconductor processing

For full catalogue click here - ORD-5753

Parker Ultra FFKM for Semiconductor High Purity Plasma Environments

FF370-78

Product Features:

  • Non-filled
  • Minimal metallic ion content
  • Ultra high purity and low extractables
  • Minimal particle generation
  • Very low erosion rate with excellent resistance to fluorine and plasmas
  • Excellent performance upto 300oC